Embedded tutorial: Test and manufacturability for silicon photonics and 3D integration

机译：嵌入式教程：硅光子学和3D集成的测试和可制造性

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Test and manufacturability challenges in Si-photonics and 3D integration are addressed. The first two papers explain Si-photonics for high-speed and high-performance interconnects. The last paper introduces 3D integration using inductive-coupling interface.

机译：解决了硅光子学和3D集成中的测试和可制造性挑战。前两篇论文介绍了用于高速和高性能互连的Si光子学。最后一篇论文介绍了使用感应耦合接口的3D集成。

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《IEEE Custom Integrated Circuits Conference》|2014年|1-1|共1页
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Sachdev Manoj; Iizuka Tetsuya;
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CMOS integrated circuits; Integrated circuit interconnections; Optical interconnections; Silicon photonics; Three-dimensional displays; Tutorials;

机译：CMOS集成电路;集成电路互连;光学互连;硅光子学;三维显示器;教程;

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专利

1. Optical via for silicon photonic 3D-integrations [J] . Lin Tianhua, Han Qin, Chu Tao Optics Communications: A Journal Devoted to the Rapid Publication of Short Contributions in the Field of Optics and Interaction of Light with Matter . 2019,第期

机译：用于硅光子3D集成光通孔
2. Implementation of silicon-on-glass MEMS devices with embedded through-wafer silicon vias using the glass reflow process for wafer-level packaging and 3D chip integration [J] . Lin CW, Hsu CP, Yang HA, Journal of Micromechanics and Microengineering . 2008,第2期

机译：使用玻璃回流工艺实现具有嵌入式晶圆通孔的玻璃上硅MEMS器件，用于晶圆级封装和3D芯片集成
3. Implementation of silicon-on-glass MEMS devices with embedded through-wafer silicon vias using the glass reflow process for wafer-level packaging and 3D chip integration [J] . Chiung-Wen Lin, Chia-Pao Hsu, Hsueh-An Yang, Journal of Micromechanics and Microengineering . 2008,第2期

机译：使用玻璃回流工艺实现具有嵌入式晶圆通孔的玻璃上硅MEMS器件，用于晶圆级封装和3D芯片集成
4. Embedded tutorial: Test and manufacturability for silicon photonics and 3D integration [C] . Sachdev Manoj, Iizuka Tetsuya IEEE Custom Integrated Circuits Conference . 2014

机译：嵌入式教程：硅光子和3D集成的测试和可制造性
5. Integrating 3D layered manufacturing with photonic sintering, precision machining and smart coating techniques for rapid casting applications. [D] . Bohra, Hemant. 2014

机译：将3D分层制造与光子烧结，精密加工和智能涂层技术相结合，可用于快速铸造应用。
6. Visual Sensor for Sterilization of Polymer Fixtures Using Embedded Mesoporous Silicon Photonic Crystals [O] . Tushar Kumeria, Joanna Wang, Nicole Chan, -1

机译：使用嵌入式中孔硅光子晶体对聚合物夹具进行灭菌的视觉传感器
7. Ultralow-loss polycrystalline silicon waveguides and high uniformity 1x12 MMI fanout for 3D photonic integration [O] . David Kwong, John Covey, Amir Hosseini, 2012

机译：超级损耗多晶硅波导和高均匀性1x12 mmi扇头3D光子集成

Embedded tutorial: Test and manufacturability for silicon photonics and 3D integration

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