Realization of Tellurium-based all Dielectric Optical Metamaterials using a Multi-cycle Deposition-etch Process

摘要

Tellurium dielectric resonator metamaterials were fabricated using a newly developed multi-cycle deposition-etch process. Deposition and etching of Tellurium were studied in detail. All the samples showed two transmission minima corresponding to magnetic and electric dipole resonances.