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Integrated solder bump electromigration test chip and coupon cards for the characterization of Pb-free SAC solders under stress

机译:集成焊料凸块电迁移试验芯片和优惠券卡,用于在应力下进行无铅囊焊料的表征

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As silicon power integrated circuits continue to shrink in scale to enable inclusion in mobile devices, the use of wafer level chip scale packages (WLCSPs) is becoming more common. Power devices are typically used in applications where a high current device relies on multiple solder connections to pass current in applications such as battery chargers and USB input switches where power transmission is important. In such applications, the traditional failure mechanism of crack propagation due to drop/shock or temperature cycling of the solder bumps can be overshadowed by electromigration failures in the Sn alloy, as relatively low current densities are required to cause voiding. To characterize the electromigration behavior of Pb-free solder bumps used in wafer level chip scale packages (WLCSPs), a combined test chip / PCB card has been designed for flexibility of test. This test vehicle combines the JEDEC recommended single ball and daisy chain type test structures on a single chip, along with a serpentine resistor specifically for characterizing the temperature of the Under-Bump Metallization (UBM) and die surface. This added resistor not only aides in the careful characterization of bump temperature near the liquidus point of the solder alloy, but also enables an asymmetrical thermal migration tests where die temperature is held higher than ambient temperature. Imaging of failed solder bumps after high stress EM testing linking lifetime data and rapid changes in the solder bump test vehicle will provide direction for high-reliability solder bump design and materials.
机译:由于硅功率集成电路继续缩小缩小以使包含在移动设备中,因此使用晶片级芯片秤包(WLCSPS)变得越来越常见。功率器件通常用于高电流器件依赖于多个焊料连接的应用中,以便在诸如电力传输的电池充电器和USB输入开关中的应用中通过电流。在这种应用中,由于焊接/冲击或焊料凸块的温度循环引起的传统故障机制可以通过SN合金中的电迁移故障来掩盖,因为需要相对低的电流密度来引起空隙。为了表征晶圆级芯片尺度封装(WLCSPS)中使用的无铅焊料凸块的电迁移行为,设计了一个组合的测试芯片/ PCB卡,专为测试的灵活性而设计。该测试车组将JEDEC推荐单球和雏菊链式测试结构与蛇形电阻相结合,具体用于表征凸块金属化(UBM)和模具表面的温度。这种添加的电阻不仅在焊接合金的液相点附近的仔细表征凸块温度的仔细表征,而且还可以使模具温度保持高于环境温度的不对称热迁移试验。在高压EM测试后,在高压EM测试后的失效焊料凸块的成像和焊料凸块试验车辆的快速变化将为高可靠性焊料凸块设计和材料提供方向。

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