An ultra-high sensitivity Surface Acoustic Wave (SAW) biosensor operated in high order mode for DNA sequences detection is proposed. Nanoscale interdigitals are fabricated on LiNbO3 substrate to achieve a high quality factor of over 4000 at about 6.4GHz. The biosensor shows an excellent linear response to the target DNA in the range of 1ng/ml to 1μg/ml and the difference of hybridized single DNA base can be distinguished. An effective DNA immobilization increases the frequency shifts greatly, which also contributes to the high sensitivity of 6.7×10-16g/cm2/Hz.
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机译:提出了一种以高阶模式运行的超高灵敏度表面声波(SAW)生物传感器,用于DNA序列检测。在LiNbO 3 sub>基板上制造纳米级叉指,以在约6.4GHz时达到4000以上的高品质因数。该生物传感器在1ng / ml至1μg/ ml的范围内对目标DNA表现出出色的线性响应,并且可以区分杂交的单个DNA碱基的差异。有效的DNA固定大大增加了频移,这也有助于获得6.7×10 -16 sup> g / cm 2 sup> / Hz的高灵敏度。
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