Design of Traveling Wave Electrode for Electro-optic polymer/TiO_2 multilayer slot waveguide modulators

摘要

We design a traveling wave electrode to drive a high-speed electro-optic (EO) polymer/TiO_2 multilayer slot waveguide modulator. The EO polymer is clipped by TiO_2 slot waveguide films to enhance mode confinement. The electrode on top of the active region and the connection transmission line is optimized to match the impedance as 50 Ω. The optical response can be up to 60 GHz at 3-dB bandwidth with a 1-cm-long electrode. For compared, changing the TiO_2 layers to silicon layers, it becomes lower to 17 GHz.