Electro-optic polymer/TiO_2 multilayer slot waveguide modulators

摘要

We report an all-dielectric electro-optic (EO) polymer/TiO_2 multilayer slot waveguide modulator with low optical insertion loss for high-speed operations. The EO polymer is sandwiched between thin TiO_2 slot waveguide films to improve mode confinement in the EO polymer. The structure increased the mode confinement in the TiO_2 and EO polymer slot layers and reduced the electrode distance between the Au electrodes without introducing optical loss from the metal electrodes. The half-wave voltage of the modulator was 6.5 V for a 5-mm-long electrode at a wavelength of 1550nm. The half-wave voltage and length product was 3.25 V·cm.