Ba0.7 Sr0.3 TiO3 thin film dielectric properties with different deposition layer

摘要

Barium strontium titanate(BaxSr1−xTiO3), BST thin film was a ferroelectric material used commercially in worldwide since decades ago. Many researches were done on this BST thin film. In this work, the experiment is focus on the dielectric properties of Ba0.7Sr0.3TiO3 thin film with different deposition layer. As the deposition layer of Ba0.7Sr0.3TiO3 increase, the dielectric properties of the thin film increase.