A new parallel mechanism for 6-DOF micro displacement and orientation measurement based on optical fiber flexure hinges

摘要

An optical fiber flexure hinge (OFFH) is presented which incorporate sensor with elastic kinematic pair, they are built into a parallel mechanism for in situ 6-DOF micro displacement and orientation measurement. The operation principle is based on bending measurement of flexure hinge itself by curvature optical fiber sensor. The OFFH curvature measurement model is analyzed. The calibration model and method is designed and a 6-DOF micro position and orientation measurement experiment system has been set up. This new sensor is compact, with wide measurement range and small measurement force, which is suitable for multi-dimensional micro operating system in situ micro position and orientation close loop control.