Monolithic integration of microelectric components and microfluidic structures in glass using femtosecond laser

机译：飞秒激光在玻璃中微电子元件和微流体结构的单片集成

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Microelectric components and microfluidic structures are monolithically integrated in a glass substrate by a femtosecond laser. The fabricated microchips are used as microheaters to control the temperature of in-channel fluids.

机译：飞秒激光将微电组件和微流体结构单片集成在玻璃基板中。所制造的微芯片用作微加热器以控制通道内流体的温度。

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《Conference on Lasers and Electro-Optics Pacific Rim》|2013年|1-2|共2页
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Xu Jian; Wu Dong; Wu Sizhu; Sugioka Koji;
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1. Vertical sidewall electrodes monolithically integrated into 3D glass microfluidic chips using water-assisted femtosecond-laser fabrication for in situ control of electrotaxis [J] . Xu Jian, Wu Dong, Ip Joanna Y., RSC Advances . 2015,第31期

机译：使用水飞秒激光制造技术将垂直侧壁电极单片集成到3D玻璃微流控芯片中，以便对电轴进行原位控制
2. Vertical sidewall electrodes monolithically integrated into 3D glass microfluidic chips using water-assisted femtosecond-laser fabrication for in situ control of electrotaxis [J] . Xu Jian, Wu Dong, Ip Joanna Y., RSC Advances . 2015,第31期

机译：使用水飞秒激光制造技术将垂直侧壁电极单片集成到3D玻璃微流控芯片中，以便对电轴进行原位控制
3. Vertical sidewall electrodes monolithically integrated into 3D glass microfluidic chips using water-assisted femtosecond-laser fabrication for in situ control of electrotaxis (vol 5, pg 24072, 2015) [J] . Xu Jian, Wu Dong, Ip Joanna Y., RSC Advances . 2015,第34期

机译：使用水辅助飞秒激光制造的垂直侧壁电极整体集成到3D玻璃微流体芯片中，用于对ElectrAtisis的原位控制（Vol 5，PG 24072,2015）
4. Monolithic integration of microelectric components and microfluidic structures in glass using femtosecond laser [C] . Xu Jian, Wu Dong, Wu Sizhu, Conference on Lasers and Electro-Optics Pacific Rim . 2013

机译：使用飞秒激光器的微电器和微流体结构的单片集成
5. Ultra-high spatial resolution diagnostics of femtosecond laser radiation-induced modification morphology in glasses for the fabrication of microfluidic and microphotonic components [D] . Hnatovsky, Cyril 2006

机译：飞秒激光辐射引起的玻璃微流控和微光子组件制造中的修饰形态的超高分辨率诊断
6. Femtosecond Laser Fabrication of Monolithically Integrated Microfluidic Sensors in Glass [O] . Fei He, Yang Liao, Jintian Lin, 2014

机译：飞秒激光制造玻璃中的单片集成微流传感器
7. Femtosecond Laser Direct Write Integration of Multi-Protein Patterns and 3D Microstructures into 3D Glass Microfluidic Devices [O] . Daniela Serien, Hiroyuki Kawano, Atsushi Miyawaki, 2018

机译：Femtosecond激光直接写入多蛋白模式和3D微结构的三维玻璃微流体装置

Monolithic integration of microelectric components and microfluidic structures in glass using femtosecond laser

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