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Inclined exposure and incomplete thermal reflow process for fabricating asymmetric microlens array

机译:倾斜的曝光和不完全热回流用于制造非对称微透镜阵列的热回流方法

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A novel fabrication method of tilted microlens array for light control films is developed to increase the efficiency of a liquid crystal display that can collect lateral light sources and improve the dazzling problem within the angle of view. Initially, the pattern allows UV exposure by placing a photoresist-coated substrate on an inclined fixture. An inclined photoresist column array is made with a round cross-section using the photolithography technique. During the incomplete thermal reflow processing, only the partial surface of photoresist column reaches the material glass transition temperature, which is transformed from a glassy state into a rubbery state. In order to minimize the structural surface energy and reduce the surface area, the surface of the inclined photoresist column forms the lens profile. With proper control of the thermal reflow temperature and time, the photoresist at the base will still maintain the original inclination and glassy state because it hasn't reached the glass transition temperature. The experimental results show that the inclined exposure from different angles can precisely control the declination angle of the inclined photoresist column. It can then fabricate the asymmetrical microlens arrays with the tilted angle larger than 33° by using the upside-down substrate and incomplete thermal reflow method.
机译:开发了一种用于光控制膜的倾斜微透镜阵列的新颖制造方法,以提高可以收集横向光源的液晶显示器的效率,并在视角内改善令人眼花缭乱的问题。最初,该模式通过将光致抗蚀剂涂覆的衬底放置在倾斜的固定装置上来允许UV曝光。使用光刻技术用圆形横截面进行倾斜的光致抗蚀剂柱阵列。在不完全的热回流处理期间,只有光致抗蚀剂柱的部分表面达到材料玻璃化转变温度,其从玻璃状状态转化成橡胶状状态。为了最小化结构表面能量并减小表面积,倾斜光刻胶柱的表面形成透镜轮廓。通过适当地控制热回流温度和时间,底座上的光致抗蚀剂仍将保持原始倾斜和玻璃状状态,因为它尚未达到玻璃化转变温度。实验结果表明,来自不同角度的倾斜曝光可以精确地控制倾斜光致抗蚀剂柱的倾斜角。然后,它可以通过使用倒置基板和不完全的热回流方法来制造具有大于33°的倾斜角度的不对称微透镜阵列。

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