Dielectric charging characterization in MEMS switches with insulator-insulator contact

摘要

A dielectric charging characterization is presented based on simple MEMS structures with insulator-insulator contact. Surface charging is generated by triboelectric effects when the MEMS switch is actuated and both insulators are in contact. Hold-down measurements were done to characterize the surface charging over a broad range of voltage and temperature. The results have shown that the pull-in voltage shift is a key charging parameter with a characteristic temperature dependent time constant.