The Growth Mechanism of LSGM Thin Film Electrolyte by RF Magnetron Sputtering

摘要

In order to discuss the growth mechanism of LSGM films,La0.9Sr0.1Ga0.8Mg0.2O2.85 (LSGM) thin films electrolytes were fabricated on Si substrates by RF magnetron sputtering.The atomic force microscope (AFM) and X-ray diffraction analyzer (XRD) were used to analyze film surface morphology and phase components.The results show that LSGM films are grown with island structure.When the deposition time increases to 30min,the preferred growth orientations appears,which is (112) crystal face.The longer deposition time is,and the rougher the surface possesses.