Advanced process equipment matching methodology in semiconductor manufacturing

摘要

The typical features in semiconductor manufacturing are complex processes, varieties of tools and tremendous data. In a mega FAB, hundreds of products are processing on thousands of tools, which request the consistency between manufacturing tools (no matter same type tools or different type tools) on the same process stage, called process equipment matching. This paper tries to explain how to set up a high efficiency and accuracy evaluation methodology on process equipment matching with mechanism and real practice. Meanwhile, the systematical application of this methodology is presented on this paper.