Characterization of lanthanide elements doped ceria nanoparticles and its performance in chemical mechanical polishing as novel abrasive particles

摘要

The conventional modification method is mainly to tune the mechanical wear of CeO₂abrasive particles in CMP, but the chemical reaction of CeO₂is unique, which is rarely reported. In this paper, cerium nanoparticles doped with lanthanide (La, Nd and Yb) were modified by incipient-wetness impregnation method. In this way, the percentage of Ce3+increased in CeO₂nanoparticles, which improved the chemical reaction activity of CeO₂, resulting in higher removal rate of dielectric material in alkaline slurry and better surface quality.