RF MEMS resonant devices for wireless communication

摘要

Future multi-band, multi-mode wireless communication system requires high performance integrated MEMS resonant devices with low power consumption, such as resonator with high quality factor (Q) and high frequency, oscillator with high stability, and filter with narrow pass-band. MEMS resonators with Q > 104 are attractive candidates to build other RF components. Utilizing high Q resonators as frequency selective components, MEMS oscillators can achieve high frequency stability comparable with quartz-based oscillators. Consisting of coupled resonator array, MEMS filters can realize narrow pass-band frequency response with good shape factor and excellent stop-band. In this paper, a MEMS disk resonator with Q>104 is presented, of which vacuum packaging and frequency stability in different environments are well studied. Based on the resonator, the MEMS oscillator with low noise feedback circuit and the tunable MEMS filter of small percent bandwidth are achieved.