Managing hazardous process exhausts in high volume manufacturing (HVM) of advanced devices

摘要

This paper reviews methods for reducing process exhaust pipe hazards in high-volume manufacturing. Process dry-pumps and point-of-use abatement systems can be integrated with essential safety devices and monitoring systems into a complete sub-fab vacuum and abatement solution. Such integrated sub-fab systems ensure safe exhaust pipe operation and reduce exposure of service staff to hazardous materials. Key safety features include continuous monitoring of pipe joint integrity which eliminates leaks, reduces safety risks, minimises environmental impact and improves process tool uptime.