SWNTs are among the strongest known fibers with low density, high thermal conductivity, high piezoresistivity, and can survive in 2-300 °C in oxygenic environment and ~ 900 °C in vacuum. Some fundamental MEMS/NEMS components, especially beams and cantilevers, will have broad applications if they are made of aligned dense SWNTs. In this paper, a fabrication process of SWNT nanoscale beams and cantilevers are presented, and some application examples like microfluidic devices are introduced.
展开▼
