MEMS slide block locking mechanism based on elastic supporting structure

摘要

Aiming at the condition that when the Fuze MEMS (micro electro mechanical system) S&A system bears setback/centrifugal overload in an experiment, the clamping head of a setback/centrifugal slide block deforms considerably when entering the clamping seat of a base plate, so that the slide block cannot be locked successfully by the clamping seat of the base plate, this paper presents an MEMS slide block locking mechanism with an elastic supporting structure. The structure of the mechanism, which is contrary to the original structure, is that rigid barbs are arranged on the clamping head, and an elastic supporting arm is arranged on the base plate. The finite element simulation with ANSYS shows that when the clamping head and the clamping arm of the locking mechanism with the elastic supporting structure bear overload, the stress of the dangerous cross-section of the locking mechanism is reduced by 52%, compared with that of the original mechanism, so that plastic deformation is avoided, and the slide block can enter the clamping seat smoothly and locked. Therefore, it can provide selection and reference for the design of locking mechanisms of MEMS S&A system in future.