Miniature fourier transform spectrometers based on electrothermal MEMS mirrors with large piston scan range

摘要

This WeThis paper reports a MEMS-based Fourier transform spectrometer (FTS) with small size, high resolution, fast sampling and low cost. The MEMS scanning mirror can generate over 300 μm piston motion at 10 Hz with only 7V_(pp) and maintain a very small tilting less than 0.03°. This high scanning performance is achieved by an innovative three-level ladder actuator design and a unique placement of sixteen of such ladder actuators. The FTS can be handheld and cover a wide spectral range of 800-2500 nm. The spectral resolution is about 5 nm at 1550nm wavelength.