Theoretical analysis of optical properties of regular and flexible surface microstructured silicon

摘要

In this paper, we study the regular and flexible microstructured silicon theoretically using the Rigorous Coupled Wave Analysis and Finite Difference Time Domain methods. We calculate the reflective spectra of the conical structures of three different sizes by using the multi-step approximation. The calculated results show that the smallest 0.5μm structures have the lowest reflectance. The angle dependence of the reflectance of microstructured silicon is also talked about. Then the Finite Difference Time Domain method is used to simulate the absorptance of the regular and flexible microstructured silicon of three different sizes. The simulated results show that the absorptance of flexible microstructured silicon is a little lower than that of the regular microstructured silicon. At last, The absorption spectrum of the flexible surface microstructured silicon is as high as 97% in the visible and insensitive to the change of the incident angle of the light. The calculated results are verified by the measured spectra.