Preparation of Silicon Nan Spheres by Using Electrical Discharge Machining Method

摘要

As one of the key technologies, preparation of silicon nanospheres is very important for developing the new types of silicon based solar cells. In this paper, with the establishment of a novel electrical discharge machining (EDM) system and the raw material of heavy doped mono-crystalline silicon (0.01Ω·cm), silicon nanospheres of which diameter are ranging from 25nm to 280nm have been successfully prepared by using EDM method. The micro surface topography and the elements composition are analyzed by the SEM and the EDS methods respectively. The formation mechanism of nanospheres has also been studied.