火花放电和高能球磨组合法制备纳米硅颗粒及微观结构表征

摘要

采用火花放电法制备出粒径均匀分布在30~50nm的纳米硅颗粒,产量为1 g/h.针对其低产率,在火花放电的基础上组合高能球磨法,成功制备出中径(D50)为80nm的纳米硅颗粒,产量可达100g/h.利用SEM、EDS、XRD、TEM等手段分别对产物的微观结构进行表征,结果表明:火花放电法所制备的纳米硅颗粒呈球形,且形貌趋于一致,但颗粒内部出现层错等晶体缺陷及非晶区域;而火花放电和高能球磨组合法制备的纳米硅颗粒呈层片状,其形貌差异较大,但颗粒内部几乎未出现非晶区域,层错缺陷更少,晶体结构更好.%In this paper,firstly fabricated SiNPs with average diameter of 30~50 nm by spark erosion and productivity of 1 g/h. In case of low productivity,this paper also processed SiNPs with mean size (D50) of 80 nm by spark erosion combining with high-energy ball milling and productivity of 100 g/h. SEM,EDS,XRD,TEM are used to study the microstructure and crystallinity of SiNPs. The results showed that SiNPs generated by spark erosion were spherical and had uniform shape. However, defects such as stacking faults and amorphous regions appeared inside the particles. As contrast,SiNPs generated by spark erosion combining with high-energy ball milling showed lamellar and obvious morphological difference.But the particales interior had little of amorphous regions,less defects such as stacking faults and better crystal structure.