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Low Temperature Graphene Synthesis By Using Microwave Plasma CVD

机译:使用微波等离子体CVD的低温石墨烯合成

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Because of its high electrical conductivity as well as chemical and physical stability graphene-based films are expected to be utilized for transparent conductive films for next-generation electrical and optoelectronic devices and various other applications. Recently the synthesis methods of graphene by using thermal chemical vapor deposition (CVD) have been developed, in which large area graphene are synthesized on Ni or Cu substrates. In this thermal CVD, high temperature of 1000degC for the decomposition of CH4 and the duration of the order of hour are required.For the realization of graphene industries the fast synthesis methods at lower temperature are desirable.
机译:由于其高导电性以及化学和物理稳定性的石墨烯基薄膜预计将用于下一代电气和光电器件的透明导电膜和各种其他应用。最近,已经开发了通过使用热化学气相沉积(CVD)的石墨烯的合成方法,其中在Ni或Cu基板上合成大面积石墨烯。在该热CVD中,高温1000degc用于CH4的分解和小时级的持续时间。对于石墨烯行业的实现,优选在较低温度下的快速合成方法。

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