THE SEM/FIB WORKBENCH: Automated Nanorobotics system inside of Scanning Electron or Focussed Ion Beam Microscopes

摘要

A good part of the understanding about material functions and process technologies was developed through preparation, handling and assembly of materials under light microscopes. But technology also depends on structure dimensions that are smaller than the wavelength of light. In light microscopy it is natural for everybody to use manual or automatic toolsets like tweezers, knives, hooks, probes and several different measurement tools. Without such handling, manipulation and manufacturing tools many present-day products and methods would not exist. No wristwatch, no in vitro fertilization, no mini-gearbox, just to mention a few. The operators of SEM, FIB or Dual Beam systems generally work without toolsets and call it natural, although the wavelength limit of light is no physical boundary for using such tools. It can be imagined how technology would be pushed when a SEM/FIB Workbench reaches the same degree of practicability and utilization as toolsets for light microscopes..