From the fabrication strategy to the device integration of gas nanosensors based on individual nanowires

摘要

In this paper the techniques required for the fabrication of gas nanosensors based on individual metal oxide nanowires on top of planar substrates will be presented. These prototypes are fabricated using sophisticated techniques, like focused ion beam, which lead to reliable devices but with a low throughput. Different fabrication strategies aimed at the mass production of such devices, combining bottom-up and top-down approaches, will be critically discussed, emphasizing their impact on the electrical behavior of the fabricated nanostructures and the limitations of the here-presented methodology.