Evaluation of properties of lapped PZT ceramics and silicon cantilever based on eutectic bonding and dicing process

摘要

Piezoelectric sensor can produce voltage when deflected (function as an energy harvester) while piezoelectric actuator can deflect when a voltage is applied. Different device applications have different requirements on the thickness and in-plane geometry of the Lead Zireonate Titanate(PZT) piezoelectric layers and thus have their own processing difficulties. In this paper. PZT-Au-Si cantilever is fabricated by eutectic bonding and dicing process.The properties of lapped PZT ceramics and silicon cantilever is also evaluated. The PZT-Au-Si cantilever applications for both piezoelectric actuators and energy harvesters have been confirmed.