Evolution of Illumination Systems in Microlithography A Retrospective

机译：微光刻中照明系统的发展回顾

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Illumination systems in microlithography have evolved from simple light mixing devices towards ultra-flexible contrast enhancement tools, enabling today's most advanced lithographic processes. A survey of the changing illumination requirements, design concepts and functionality is given.

机译：微光刻技术中的照明系统已经从简单的光混合设备发展到超柔韧性的对比度增强工具，从而实现了当今最先进的光刻工艺。给出了对不断变化的照明要求，设计概念和功能的调查。

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《International optical design conference;2010 IODC》|2010年|p.76520X.1-76520X.6|共6页
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Alois M. Herkommer;
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正文语种
中图分类工程光学;
关键词
Microlithography; Illumination Design; Illumination Settings; Variable Illumination; Partial Coherence; Source Mask Optimization; Programmable Illuminator;

机译：微光刻;照明设计;照明设置;可变照明;部分连贯;源掩模优化;可编程照明器;

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2. Photocatalytic Hydrogen Evolution Under Visible Light Illumination in Systems Based on Graphitic Carbon Nitride [J] . Stroyuk O. L., Raevskaya A. E., Kuchmy S. Ya. Theoretical and Experimental Chemistry . 2018,第1期

机译：基于石墨氮化物的系统可见光照明下的光催化氢气进化
3. Rhenium electroless deposition on p-Si(1 0 0) from HF solutions under illumination: Hydrogen evolution reaction onto p-Si/Re systems [J] . Eduardo C. Mu_oz, Ricardo S. Schrebler, Paula C. Grez, Journal of Electroanalytical Chemistry: An International Journal Devoted to All Aspects of Electrode Kinetics, Interfacial Structure, Properties of Electrolytes, Colloid and Biological Electrochemistry . 2009,第1期

机译：在光照下从HF溶液在p-Si（1 0 0）上进行化学沉积：p-Si / Re系统上的氢释放反应
4. Evolution of Illumination Systems in MicrolithographyA Retrospective [C] . Alois M. Herkommer International Optical Design Conference . 2010

机译：微晶体扫描中的照明系统的演变
5. The impact of manuscript illumination on the evolution of artistic style from the Franco -Gothic to the Italo -Gothic in Castile during the XIVth century [D] . Brooker, Robert E., Jr. 2005

机译：手稿照明对十四世纪卡斯蒂利亚从法兰西哥特式到意大利哥特式艺术风格演变的影响
6. 3D Microlithography Using an Integrated System of 5-mm UV-LEDs with a Tilt-Rotational Sample Holder [O] . Sabera Fahmida Shiba, Hyeongmin Jeon, Jong-Soo Kim, 2020

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7. Topology optimization for optical microlithography with partially coherent illumination [O] . Zhou Mingdong, Lazarov Boyan Stefanov, Sigmund Ole 2017

机译：具有部分相干照明的光学微光刻的拓扑优化

Evolution of Illumination Systems in Microlithography A Retrospective

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