高世代平板显示光刻机照明系统中梯形视场的设计与仿真

摘要

针对大面积薄膜晶体管(TFT)液晶显示生产中的高世代光刻机(6代以上)照明系统改进,设计了一种新颖的梯形拼接照明视场方案.使用设置在微透镜阵列入瞳处的视场光阑阵列实现了梯形拼接照明视场,同时简化了系统设计.相较于以尼康平板液晶显示器(FPD)光刻机为代表的现有梯形拼接视场方案,提出的设计方案能减少投影物镜的热负担,同时在一定程度上提高照明系统的光能透过率.通过Lighttools建模分析,说明该设计方案能够实现梯形照明视场并且积分均匀性在1%以内,达到了设计预期效果.%In order to satisfy the production requirement of large-area thin film transistor(TFT) liquid crystal display,a novel high-generation(above the 6th generation) optical illumination system used in the trapezoidal field stitching is proposed in this paper.By using a trapezoidal field stop array at the entrance pupil of the micro-lens array,the illumination system can be simplified and realize uniform trapezoidal illumination field.Compared with current design of Nikon flat pannel display(FPD) lithography,the proposed illumination system can not only effectively reduce projection lenses" heat effect,but also improve transmittance.In the simulation with Lighttools,the result shows that the integral illumination uniformity of our proposed optical system is less than 1% and the trapezoidal illumination field is realized,which satisfies the design requirement for the illumination system.