Analysis of dynamic effects of charge injection due to ESD in MEMS

机译：MEMS中ESD引起的电荷注入的动态效应分析

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A model is developed to analyze the effect of a leaky dielectric layer and air gap space charge on the frequency response of a capacitive MEMS structure. A straight line approximation technique is employed to estimate the transfer function for various input variables. Conditions for a no operation mode are assessed.

机译：开发了一个模型来分析漏电介质层和气隙空间电荷对电容MEMS结构的频率响应的影响。采用直线近似技术来估计各种输入变量的传递函数。评估无操作模式的条件。

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《2010 32nd Electrical Overstress/ Electrostatic Discharge Symposium》|2010年|1-8|共8页
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Greason William D.;
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中图分类电器;
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1. Analysis of charge injection processes including ESD in MEMS [J] . Greason WD Journal of Electrostatics . 2008,第11a12期

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2. Effect of Charge Injection Due to ESD on the Operation of MEMS [J] . Greason W.D. Industry Applications, IEEE Transactions on . 2009,第5期

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4. Analysis of dynamic effects of charge injection due to ESD in MEMS [C] . Greason William D. 2010 32nd Electrical Overstress/ Electrostatic Discharge Symposium . 2010

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Analysis of dynamic effects of charge injection due to ESD in MEMS

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