METAL ELECTRODES FOR ELIMINATION OF SPURIOUS CHARGE EFFECTS IN ACCELEROMETERS AND OTHER MEMS DEVICES

摘要

A MEMS device, in particular an accelerometer, configured to eliminate spurious charge effects having a first electrode with a top and bottom surface, a second electrode with a top and bottom surface, and a proof mass paddle with a top and bottom surface. The top surface of the proof mass paddle is beneath the bottom surface of the first electrode and the bottom surface of the proof mass paddle is above the top surface of the second electrode. The MEMS device includes a first metal layer on the top and bottom surfaces of the proof mass paddle, on the bottom surface of the top electrode, and on the top surface of the bottom electrode. The MEMS device can also have a second metal layer on top of the first metal layer. The device is manufactured using direct bonding/ fusion bonding.