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Transparent conducting thin films of fluoro doped tin oxide (FTO) deposited using inkjet printing technique

机译:使用喷墨印刷技术沉积的氟掺杂氧化锡(FTO)的透明导电薄膜

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FTO thin films were successfully prepared by inkjet printing technique. FTO precursor was prepared by reacting SnCl4.5H2O and NH4F at 60°C in a sealed container. The number of layers was set up from two to five layers on the glass substrate and was deposited at room temperature around 25 to 27° C, 40° C and 60° C to determine the optimum properties for thin films performance. Morphology analysis study using VP-SEM shows the existence of fine grains with the size ranging 20 to 30 nm and the existence of crystal shape with the increases of deposition temperature. Fluorine concentration in the thin films determined from XPS analysis shows the ratio of[F]/[Sn] at 0.02 with the Sn d5/2 Sn 4+, O1s as O2-, and F1s as Sn-F bond peaks at binding energy 486.6 eV, 530.5 eV and 684.4 eV. The optical transmittance analysis showed the deposition temperature improved the optical transmittance; 60% T at ambient to 80% T at 60° C. The optimum optical transmittance was 91% T for the thin film deposited at 40° C. The sheet resistances were 16 Ω/□, 21 Ω/□ 23 Ω/□ for the thin film deposited at 40° C, ambient temperature and 60° C.
机译:通过喷墨印刷技术成功制备了FTO薄膜。通过在密封容器中于60°C下使SnCl 4 .5H 2 O和NH 4 F反应来制备FTO前体。在玻璃基板上将层数设置为两层至五层,并在室温下约25至27°C,40°C和60°C的温度下沉积,以确定薄膜性能的最佳性能。使用VP-SEM进行的形态分析研究表明,随着沉积温度的升高,存在尺寸为20至30nm的细晶粒,并且存在晶体形状。通过XPS分析确定的薄膜中的氟浓度显示[F] / [Sn]与sn d 5/2 Sn 4 +,O 1s 的比率O 1为O 2-,F1为Sn-F键,其结合能为486.6 eV,530.5 eV和684.4 eV。透光率分析表明,沉积温度提高了透光率。在环境温度下为60%T,在60°C下为80%T。对于在40°C下沉积的薄膜,最佳光学透射率为91%T。薄膜电阻为16Ω/□,21Ω/□23Ω/□。在40°C,环境温度和60°C下沉积的薄膜。

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