Self-assembly Growth and Size Control of Silver Nanocrystals for Nonvolatile Memory Applications

摘要

A film with a single-layer of size controlled silver nanocrystals embedded in silicon dioxide (SiO_2) dielectric film by magnetic sputtering has been fabricated for nonvolatile memory applications. The effects of sputtering power, deposition time and substrate temperature on Ag nanocrystals formation were investigated. Transmission electron microscopy (TEM) images showed the as-prepared Ag nanocrystals had high uniformity in their size and distribution. The relationship between Ag nanocrystal size, density and electron storage capability as well as date retention time has been discussed.