Hydrogen Gas Sensors Fabricated on Atomically Flat 4H-SiC Webbed Cantilevers

摘要

This paper reports on initial results from the first device tested of a "second generation" Pt-SiC Schottky diode hydrogen gas sensor that: 1) resides on the top of atomically flat 4H-SiC webbed cantilevers, 2) has integrated heater resistor, and 3) is bonded and packaged. With proper selection of heater resistor and sensor diode biases, rapid detection of H_2 down to concentrations of 20 ppm was achieved. A stable sensor current gain of 125 ± 11 standard deviation was demonstrated during 250 hours of cyclic test exposures to 0.5% H_2 and N_2/air.