Fast Switching Characteristics of 4H-SiC RESURF-type JFET

摘要

400V/2.5A 4H-SiC JFETs having a reduced surface field (RESURF) structure were fabricated. Measurements on the static and switching characteristics were carried out. The on-resistance was 0.86 Ω. The turn-on time (t_(on)) and the turn-off time (t_(off)) were 8ns and 10 ns, respectively. The fabricated JFETs showed low on-resistance and fast switching characteristics. 4H-SiC RESURF-type JFETs, which is a sort of lateral transistor, are preferable to a module configuration of switching devices. Moreover, they are promising for application to DC power supplies with higher efficiency and smaller size owing to their low on-resistance and fast switching characteristics.