Design and fabrication of on-chip square spiral antenna for ISM band

摘要

A spiral antenna operating at 24 GHz designed for scientific and medical (ISM) band is reported. The procedure is fully compatible with standard CMOS fabrication process. The fabrication has been achieved on silicon substrates using a bulk micromachining technique. To improve the radiation efficiency and to minimize transmission loss, a silicon-based membrane has been employed on silicon substrates. To optimize the occupied area of the antenna a square spiral structure is selected rather than the circular one. The simulation results show a good matching and wide bandwidth operation of the spiral antenna.