Preparation of surface photovoltage VOC detector

摘要

We successfully prepared the surface photovoltage sensor system using several types of modified mesoporous silica as a sensitive materials. The sensitive materials were fabricated using self-ordered and structure-controlled modified mesoporous thin films, which is synthesized by a molecule surfactant method using spin coating. The surface photo voltage sensor was characterized for the dangerous gas including different kind of VOC gas. The gas sensor, which is based on a metal-insulator-semiconductor (MIS) structure, showed high sensitivity and fast response at room temperature.