Fabrication of GHz range oscillators stabilized by nano-carbon-diamond-based surface acoustic wave resonators

摘要

A lot of work has been dedicated to evaluate the interest of Diamond films for the development of high frequency surface acoustic wave (SAW) devices for various Radio- Frequency (RE) applications. The main interest of such a material consists in its very high acoustic phase velocities. In this work, different research groups are collaborating to identify the capability of diamond-based substrates to allow for the development of SAW resonators at 5 GHz and above, to stabilize RE oscillators in that frequency range. Nano-crystalline diamond (NCD) particularly is investigated in that matter, coupled with various piezoelectric layers. Design of single and double port SAW resonators operating near 5 GHz: are reported, as well as experimental results for SAW resonators built atop the considered material combinations These results allows for identifying the best configuration for the development of high frequency sources.