Submicron electrode fabrication technology & application to 10GHz range surface acoustic wave (SAW) transducers

摘要

This paper describes the fabrication techniques and structures of highly efficient 10-GHz range SAW filters using low loss λ/4 type narrow gap unidirectional transducers with different electrode thickness and group type unidirectional transducers with reflector banks. They have been fabricated by direct wafer writing using electron beam exposure. SAW filters ranging from 5-15GHz have been successfully fabricated and a low loss along with a high value of directivity have been obtained.