Low-stress glue-free mounting technology for optical elements

摘要

Jenoptik Laser, Optik, Systeme GmbH has developed a new mounting technology for optical elements. It is free of anyglue or other organic material whereby it is excellently appropriate to the use for DUV Systems, especially if highintensity occurs as it is to be found in illuminating systems.The new technology has been successfully applied in high quality lenses e.g. in a high NA inspection lens @266nm andseveral ultra high quality imaging systems @ 193nm.The so called Clamp Mount Technology is characterized by high accuracy and stability under environmental influencesuch as shock, vibration or thermal effects. There is no limitation in use with any optical material e.g. fused silica orcalcium fluoride.The lens cells are routinely optimized by finite element method. Thus in advance clamp force is optimized having regardto deformation of optical surfaces, lens shape, lens weight, gravity and shock load. Additionally stress inducedpolarization effects are predictable.The FEM simulation results can be transferred to optical design tools which are used for lens design as much as forcomparing design data with experimental results.