Actuating the Deformable Mirror: a Multiphysics DesignApproach

摘要

The crucial component of an Adaptive Optics unit is the actuation system of the deformable mirror. One possible implementation comprehends a linear force motor and a capacitive sensor providing the feedback measure signal. Due to the extreme accuracy required by the optics, a proper design of the actuator is essential in order to fulfill the specifications. In the device, mechanics, electrostatics, electromagnetism and thermal effects are mutually related, and they have to be properly considered in the design phase. This paper analyzes such a multiphysics behavior of the actuation system, providing an inter-disciplinary approach able to define the optimized device: a capacitive sensor measuring the displacements at the nanometer accuracy and a closed loop linear motor delivering the requested force with the lowest possible power dissipation, in order to minimize the degrading of the optical waves propagation.