机译:利用高密度2D致动器的滞后可变形镜的影响功能
Univ Groningen Fac Sci &
Engn Engn &
Technol Inst Groningen Discrete Technol &
NL-9747 AG Groningen Netherlands;
Univ Groningen Fac Sci &
Engn Engn &
Technol Inst Groningen Discrete Technol &
NL-9747 AG Groningen Netherlands;
Univ Groningen Fac Sci &
Engn Engn &
Technol Inst Groningen Computat Mech &
Mat NL-9747 AG Groningen Netherlands;
SRON Netherlands Inst Space Res Groningen Netherlands;
Univ Groningen Fac Sci &
Engn Engn &
Technol Inst Groningen Discrete Technol &
NL-9747 AG Groningen Netherlands;