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Electrodynamic models of resonator sensors in microwave diagnostics of semiconductors

机译:半导体微波诊断中谐振传感器的电动力学模型

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The paper is dedicated to electrodynamic models of resonator sensors, which are used in microwave diagnostics of semiconductors. Research results are compared using exact and approximate models. The field of use of the latter for description of resonator sensors of capacitive type is determined.
机译:本文致力于谐振器传感器的电动力学模型,该模型用于半导体的微波诊断。使用精确模型和近似模型比较研究结果。确定了后者用于描述电容型谐振器传感器的使用领域。

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