Analysis of response of the micro-machined poly-silicon cantilever subjected to vibration environment

摘要

With the decrease in the dimension the microstructure, the effect of the interaction between the surfaces of the neighboring structures on the dynamic characteristics cannot be ignored. We present a comparison of the dynamic responses of the beam with and without considering the adhesive forces by simulating the dynamic behavior of the beam with a commercial software ANSYS. With the effect of the adhesive forces, the dynamic characteristics of the beam deviate from that of the beam without considering the adhesive forces. The reliability and the precision of the MEMS products using cantilevers are diminished.