On investigation of impurities of tetrafluorosilane by microwave gas spectroscopy method

机译：微波气相色谱法研究四氟硅烷中的杂质

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The possibilities of using a microwave gas spectroscopy method for the investigation of impurities of silanes are considered in this paper. The absorption lines of known impurities at 2-mm wavelength range are analyzed. The presence of freons in tetrafluorosilane was experimentally found.

机译：本文考虑了使用微波气相色谱法研究硅烷杂质的可能性。分析了2 mm波长范围内已知杂质的吸收线。实验发现四氟硅烷中存在氟利昂。

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《Infrared and Millimeter Waves, 2004 and 12th International Conference on Terahertz Electronics, 2004. Conference Digest of the 2004 Joint 29th International Conference on》|2004年|p.381-382|共2页
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Vaks V.L.; Chernyaeva M.B.; Klyueva N.V.; Domracheva E.G.; Sennikov P.G.; Chuprov L.A.;
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中图分类无线电电子学、电信技术;
关键词
organic compounds; impurities; microwave spectra; infrared spectra; absorption coefficients; tetrafluorosilane; microwave gas spectroscopy method; impurities; absorption lines; freons; 2 mm;

机译：有机化合物;杂质;微波光谱;红外光谱;吸收系数;四氟硅烷;微波气相色谱法;杂质;吸收线;氟利昂; 2 mm;

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On investigation of impurities of tetrafluorosilane by microwave gas spectroscopy method

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