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Device stability of metamorphic InP/InGaAs heterojunction bipolar transistors by optical and electrical characterization

机译:光电特性表征变质InP / InGaAs异质结双极晶体管的器件稳定性

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Optical and electrical characterizations such as photoluminescence (PL) and low frequency noise measurements have been performed on different MHBT structures before and after the device processing to understand the correlation between these parameters and the device performance. The structural stability of the MHBTs subjected to rapid thermal annealing (RTA) has also been investigated by PL. The experimental results indicate a good correlation between the optical and electrical characteristics.
机译:在器件处理之前和之后,已对不同的MHBT结构进行了光和电学表征,例如光致发光(PL)和低频噪声测量,以了解这些参数与器件性能之间的相关性。 PL还研究了经受快速热退火(RTA)的MHBT的结构稳定性。实验结果表明,光学和电气特性之间具有良好的相关性。

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