We investigate the thermal diffusivity of nano-structured TiO_2 and TiO_2 with 3% ZnFe_2O_4 ceramic films (run films) sputtered on a <111> cut Si substrates by using the Mirage effect method. Two series of films are prepared by the magneto-rf-spurt method. The investigation results show that: The thermal diffusivity of nano-structured film depends on the thickness of film and the annealing temperature. The thicker the film, the lower thermal diffusivity of the sample is. The value of thermal diffusivity increases with the increasing of the annealing temperature. It means that the thermal diffusivity depends on the phase structure of the film. The detail results, analyses and discussions will be presented in this paper.
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