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New State-of-Art Dry Film Technology for Fine Lines in High Yield

机译:用于高产量细线的最新干膜技术

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Dry film photoresist to produce highly integrated and advanced PWBs has been developed to meet more demanding fine line requirements. Advantages for volume production of fine features below 50μm with high yield are now available with newly developed dry film photoresist that is designed to have specific features. In order to develop such a highly reliable dry film photoresist, Quality Function Deployment (QFD) helped significantly to well interpret 'Voice-Of-the-Customer' (VOC) into specific requirement of dry film photoresist performance and how it can be achieved by formulation design. The developed dry film photoresist resulted in L/S resolution and isolated adhesion better than 1:1 aspect ratio to thickness, with very wide exposure range, and with wide developing latitude.
机译:已经开发出用于生产高度集成和先进的PWB的干膜光刻胶,以满足更苛刻的细线要求。新开发的具有特定特征的干膜光刻胶现在可用于批量生产50μm以下微细特征且具有高产量的优势。为了开发这种高度可靠的干膜光刻胶,质量功能部署(QFD)有助于很好地将“客户之声”(VOC)解释为干膜光刻胶性能的特定要求以及如何通过以下方法实现配方设计。显影后的干膜光致抗蚀剂的L / S分辨率和孤立的附着力均好于厚度的纵横比,其比率大于1:1,并且具有非常宽的曝光范围,并且具有宽广的显影范围。

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