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Electrically Mediated Pulse Reverse Copper Plating of Electronic Interconnects without Brighteners/Levelers

机译:不含增白剂/矫平剂的电子互连件的电介脉冲反向镀铜

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This paper describes a process for plating of interconnects for advanced electronic modules. In contrast to traditional chemical mediation of plating processes, this process is electrically mediated and does not rely on difficult to control brighteners/levelers. The methodology for selection of the electric mediation p; rameters is based on considerations of mass transfer and microprofiles/macroprofiles related to current distribution. This paper builds on earlier work by incorporating plating cell/tank design issues including air agitation, eductor agi ation, eductor orientation, back and forth panel, movement and knife-edge panel movement. Data for plating industry test panels containing microvias and PTHs of approximately 4:1, 10:1, and 20:1 aspect ratios are presented.
机译:本文介绍了一种电镀高级电子模块互连的方法。与传统的电镀过程的化学介导相反,该过程是电介导的,并且不依赖于难以控制的增白剂/流平剂。选择电调解p的方法;参数是基于传质和与电流分布相关的微观轮廓/宏观轮廓的考虑。本文在早期工作的基础上,结合了电镀槽/槽的设计问题,包括空气搅动,喷射器搅拌,喷射器方向,前后面板,移动和刀刃面板移动。给出了电镀工业测试面板的数据,其中包含纵横比约为4:1、10:1和20:1的微孔和PTH。

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