Object-oriented hybrid PN model of semiconductor manufacturing line

摘要

Modeling of semiconductor manufacturing lines has always been a difficult issue. By employing the graphical description and mathematical expression of Petri nets, the paper defines the concept of work center and establishes the object-oriented PN model (OPN). Furthermore, the continuous and discrete transitions are combined to reduce the dimension of the model, finally the object-oriented hybrid PN model is established. This model provides a good foundation for studying scheduling policies.