^7fThis paper reviews the current status of laser fuse processing and discusses the challenges ahead. Various processing parameters are discussed including laser wavelengths, laser pulse duration and shaping, laser beam polarization, laser beam positioning accuracy, and thermal effect, and their impacts on fuse size limitation. We also examine the interrelationships among these parameters. Experiments and evaluations have been conducted, including the use of new laser sources and processing techniques, improved optical system, and beam positioning system. The results, together with several potential solutions for the next generation of laser memory repair system, are presented.
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